Listing# 772345

Axcelis Technoloiges / Eaton Nova NV-6200A Medium Current Ion Implanter

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Location:  East Asia/Pacific

Level of Removal:  Uncrated/Loose

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Equipment Description
Axcelis Technoloiges / Eaton Nova NV-6200A Medium Current Ion Implanter

  • Dimension: (W) 1950cm x (D) 4600cm x (H) 2450cm
  • Power: 3phase , 208V, 70A
    Compressor: Cti- Cryogenic, model : 8500, sn:68L02431
    Cryo pump: Cryo-torr 8cryopump sn: 32B9529468, sn:32C916353, sn:32H9427590
    Dry pump 1: Edward, model : QDP80. SN:19730,
    Dry pump 2: Edward, Model : QDP40/12368 + QMB250/962048517
    Dry pump controller: Edward, sn:s96018816, 3phase, 200-208V, 50/60Hz, 6.6kva
  • Scrubber: Vector technology
    Process gas : BF3, PH3, AsH3
    Sn : ES400

  • Specifications:

    Manufacturer Name
    Axcelis Technologies Inc


    208 VOLTS
    208 VOLTS

    70 AMPS
    70 AMPS

    Recommended Packaging Form:


    76.77 x 181.10 x 96.46 in - 9920.70 lb
    1950 x 4600 x 2450 MM - 4500 KGS


    This lot is being sold "as is, where is". We recommend that you contact an EquipNet sales representative to set up your own inspection. This item is located in

    East Asia/Pacific.

    This equipment is subject to a removal and loading charge.

    The written description provided for this equipment is EXACTLY what you will receive if you opt to purchase this listing. Any items that are not in the description but appear in the visual representations of this listing will not be included in the sale. Photos and video are provided just as references and to give a general sense of condition.

    Please be aware that weights and dimensions of equipment provided on EquipNet’s listings are estimates and can vary from actual weights and size. Sellers estimates are often not precise especially when equipment was installed versus prepped for shipment. As such, please do not fully rely on the accuracy of this information in EquipNet’s listings for shipping quotes and/or user size requirements.

    Any license associated with this equipment is non-transferable.

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