Listing# 793387

Plasma-Therm LLC SLR-770B Deep Reactive Ion Etcher

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Location:  CA, USA

Level of Removal:  Still Installed

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Equipment Description
Plasma-Therm LLC SLR-770B Deep Reactive Ion Etcher
Manufacturer....Plasma Therm. Inc
Model SLR- 770B
Ser. # PTI 81068F
Date of manufacture.. 10/20/1998
DRIE is 4” with 6” Kit

The DRIE was used for the Bosch process only.
Gasses connected are:-
Argon, for maintaining plasma.
Sulfur Hexafluoride (SF6), for Silicon etching.
Octafluorocyclobutane(C4F8) for passivation layer.
Oxygen(O2), for chamber clean.
Nitrogen (N2), for venting.

Etching silicon using photoresist mask.

Manufacturer Name
Plasma-Therm LLC

10 20 1998
10 20 1998

Serial Number:
PTI 81068F
PTI 81068F



8 x 8 x 6 FT - 2200 LBS
243.84 x 243.84 x 182.88 cm - 997.92 kg


This lot is being sold "as is, where is". We recommend that you contact an EquipNet sales representative to set up your own inspection. This item is located in


This equipment is subject to a removal and loading charge.

The written description provided for this equipment is EXACTLY what you will receive if you opt to purchase this listing. Any items that are not in the description but appear in the visual representations of this listing will not be included in the sale. Photos and video are provided just as references and to give a general sense of condition.

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Any license associated with this equipment is non-transferable.

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