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Listing #525401

Tegal 6550 Etcher System

$230,000.00 USD Make An Offer
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The seller of this equipment requires buyers be charged CA sales tax. CA Resellers only please submit BOE-230 for exemption. For any sale leaving California a BOL is required for sales tax exemption.

Equipment Description

Please note: This equipment is currently in storage and not located at its original location.

Tegal 6550 Etcher System

RIE system, 8", this has only been used in a demo lab at the OEM
Configured to support MRAM development
Platform: Rinse / strip, through-the-wall, signal tower, CE Marked
PDM: Standard
AC Supply: 400V, 3 Phase, 50 Hz, 5 Wire (Can be easily configured for USA operation)

System includes:
(Qty 2) Patented Spectra Plasma Process Modules
Standard Ceramic Electrostatic Clamp (200mm)
High Temp. Electrostatic Clamp (200mm)
(Qty 2) Integrated Diode Array Optical Analyzers
(Qty 2) Recirculating Temperature Control Units
Vacuum Cassette Elevator Loadlock
Core Vacuum Transport Module w/ Robot
Wafer Aligner Module
ICP Strip Process Module
Spin-Rinse/Dry Process Module
Atmospheric Transport Module w/ Robot
Remote RF Generator Cabinet
Remote Power Distribution Module
Integrated Human Interface and Control System
Remote LCD Interface Module
Cleanroom Signal Tower (3 Color Standard)

Shape: Round
Standard: SEMI
Size: 8"
Align: Notch
Material: Silicon
Thickness: SEMI

PM 1: Spectra 1.0, Special HT-ESC
MFC Type: Mykrolis Tylan FC2900
Gas 1: BCl3, 0-200sccm
Gas 2: Cl2, 0-50sccm
Gas 3: SF6, 0-50sccm
Gas 4: HBr, 0-50sccm
Gas 5: CF4, 0-50sccm
Gas 6: Ar, 0-200sccm
Gas 7: He (Water temperature control)
LF Generator: 600 watts
HF Generator: 1200 watts
Gas injection: Open ring
PM turbo pump: 1000L/s
End point: Diode array
LE Temp range: Filtered house cooling water

PM 2: Spectra, Special High vacuum mod's
MFC Type: Mykrolis Tylan FC2900
Gas 1: Spare
Gas 2: Spare
Gas 3: He, 0-200sccm
Gas 4: Spare
Gas 5: Ar, 0-100+sccm
Gas 6: Ar, 0-500+sccm
Gas 7: He (Water temperature control)
LF Generator: 300 watts
HF Generator: 1200 watts
Gas injection: Open ring
PM turbo pump: 1000L/s
End point: Diode array
LE Temp range: Noah Precision: Galden PFPE HT170

PM 3: ICP Strip Module
MFC Type: Millipore Tylan 2900
Gas 1: O2, 0-2000sccm
Gas 2: N2, 0-500sccm
Gas 3: He, 0-500sccm

PM4: DI Water Rinse module

Gas 3 for PM3 (strip) and Gas 4 for PM2 (etch) is a pre-mix of 4% H2 in Helium for passivation treatment
Gas 5 for PM2 (etch) is a pre-mix of 0.1% +/- 0.005% O2 in Ar for stop on barrier etch
(Rev 5) Add 50sccm SF6 MFC (UNIT) for Gas 3 in PM1

ICP Cl2 / CFxHy etch chamber (primary etch chamber)
ICP low-voltage Ar mill "SOM"
Anti-corrosion treatment used with He / H2 or N2 / H2
Anti-corrosion Water rinser
O2-based asher

Edwards QDP-40,80
Gas reactor column - Edwards M150

~2003 vintage.

Equipment Specifications

Conversion Tools
Voltage400 VOLTS400 VOLTS
Frequency50 HERTZ50 HERTZ
Recommended Packaging FormCUSTOM PALLET 
Estimated Shipping Weight11605 LBS5264.03 kg
Estimated Shipping Length278 IN706.12 cm
Estimated Shipping Width120 IN304.80 cm
Estimated Shipping Height94 IN238.76 cm
Disclaimers ▼
This lot is being sold "as is, where is". We recommend that you contact an EquipNet sales representative to set up your own inspection. This item is located in California.

This equipment is subject to a removal and loading charge.

The written description provided for this equipment is EXACTLY what you will receive if you opt to purchase this listing. Any items that are not in the description but appear in the visual representations of this listing will not be included in the sale. Photos and video are provided just as references and to give a general sense of condition.

Please be aware that weights and dimensions of equipment provided on EquipNet’s listings are estimates and can vary from actual weights and size. Sellers estimates are often not precise especially when equipment was installed versus prepped for shipment. As such, please do not fully rely on the accuracy of this information in EquipNet’s listings for shipping quotes and/or user size requirements.

Any license associated with this equipment is non transferable.

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