Listing# 1080130
Jeol JBX-5500FS Electron Beam Lithography System
Seller's Acceptable Currency:
$75,000.00 USD
Make An OfferLocation: United Kingdom
Level of Removal: Uncrated/Loose
*All offers are submitted in Seller’s Acceptable Currency
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Asset Documents
Equipment Description
Jeol JBX-5500FS Electron Beam Lithography System
System Components Include
Layout cables and UK mains transformer
4 Inch Wafer Holder
Cooling Water System
Liquid Crystal Display
Workstation
Dry Pump
Personal Computer
Control Software
Three sample holders and the dry box to store them
The tool has been maintained approximately annually since installation and seller has service records
Note: the electron emitter has expired and will need replacement by the manufacturer or buyer
Company is selling system since its not used enough to justify continuing the maintenance contract and do not have expertise in-house to do the work themselves
Manufactures General Information
The JBX-5500FS is an electron-beam lithography system that employs spot-beam vector scanning for sub-micron and nano-lithography.
This has two selectable writing modes: High-resolution writing mode (5th Lens mode) for nano-lithography and High-speed writing mode (4th Lens mode) for sub-micron lithography. And the accelerating voltage is also selectable either 25kV or 50kV.
The beam scanning speed is up to 12MHz and it realizes high-speed electron-beam lithography.
The stage moving system employs step-and-repeat method and the stage position is controlled by high-precision laser interferometer. This stage can load a wafer substrate up to 4 inches.
The control system of the JBX-5500FS employs Microsoft® Windows® PC. The graphical and streamlined user-interface from pattern design to writing enables easy operation.
More detailed specifications including service reports & performance test results are available upon request
NEW price was over £700,000 Euros
System Components Include
Manufactures General Information
Specifications:
Standard
Metric
Manufacturer Name
Jeol
Year:
2012
2012
Serial Number:
SB8011000080001
SB8011000080001
Model:
JBX-5500FS Electron Beam Lithography System
JBX-5500FS Electron Beam Lithography System
Voltage:
100 / 200
VOLTS
100 / 200
VOLTS
Frequency:
50/60
HERTZ
50/60
HERTZ
Recommended Packaging Form:
CRATE
CRATE
Dimensions:
Standard
Metric
Overall:
40.55 x 40.55 x 70.87 in - 2.20 lb
1030 x 1030 x 1800 MM - 1 KGS
Disclaimer
This lot is being sold "as is, where is". We recommend that you contact an EquipNet sales representative to set up your own inspection. This item is located in
Europe
This equipment is subject to a removal and loading charge.
The written description provided for this equipment is EXACTLY what you will receive if you opt to purchase this listing. Any items that are not in the description but appear in the visual representations of this listing will not be included in the sale. Photos and video are provided just as references and to give a general sense of condition.
Please be aware that weights and dimensions of equipment provided on EquipNet’s listings are estimates and can vary from actual weights and size. Sellers estimates are often not precise especially when equipment was installed versus prepped for shipment. As such, please do not fully rely on the accuracy of this information in EquipNet’s listings for shipping quotes and/or user size requirements.
Any license associated with this equipment is non-transferable.
