Listing# 772349

Canon FPA - 2500 i2 Stepper

Seller's Acceptable Currency:

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Location:  East Asia/Pacific

Level of Removal:  Uncrated/Loose

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Equipment Description
Canon FPA - 2500 i2 Stepper

  • 1) Configuration
    Main Unit: FPA-2500 i2
    Electrical: 3Ø AC 200V 50/60Hz
    Rated power: 18.7 KVA
    Reticle Size: 6", Canon STD
    Wafer Size : "6
    Wafer Feeder: Type-L
    PA Unit: 6", O.F Type
    Chamber: TBW-CD60
    Illuminator: FPA-2500 i line
    Console version:
    A Scope: i-line, TTL
    T/Z-Tilt Unit: 3 (L,M,R)
    Support Mount: Servo Passive Damper 4
    Lamp House: 1.5KW

  • Parts System

  • Specifications:
    Manufacturer Name


    FPA - 2500 i2
    FPA - 2500 i2

    Process Capability:

    Recommended Packaging Form:


    108 x 96 x 84 IN - 4500 LBS
    2743.20 x 2438.40 x 2133.60 mm - 2041.20 kg


    This lot is being sold "as is, where is". We recommend that you contact an EquipNet sales representative to set up your own inspection. This item is located in

    East Asia/Pacific.

    This equipment is subject to a removal and loading charge.

    The written description provided for this equipment is EXACTLY what you will receive if you opt to purchase this listing. Any items that are not in the description but appear in the visual representations of this listing will not be included in the sale. Photos and video are provided just as references and to give a general sense of condition.

    Please be aware that weights and dimensions of equipment provided on EquipNet’s listings are estimates and can vary from actual weights and size. Sellers estimates are often not precise especially when equipment was installed versus prepped for shipment. As such, please do not fully rely on the accuracy of this information in EquipNet’s listings for shipping quotes and/or user size requirements.

    Any license associated with this equipment is non-transferable.

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